Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination | Patent Number 10337991

US 10337991 B2
Application Number15115752
Publication NumberUS 20180031470 A1
Pendency3 years, 1 month, 1 day
Filled DateJun 1, 2016
Priority DateDec 8, 2015
Publication DateFeb 1, 2018
Expiration DateDec 7, 2035
Inventor/ApplicantsVladimir Levinski
ExaminesBOLOGNA, DOMINIC JOSEPH
Art Unit2877
Technology Center2800
Assignments
Kla Corporation
Current
Kla Corporation
Original
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