Glass-modified stress waves for separation of ultra thin films and nanoelectronics device fabrication | Patent Publication Number 20070039395

US 20070039395 A1

Patent NumberUS 07487684 B2

Application Number11504981

Filled DateAug 15, 2006

Priority DateMar 5, 2004

Publication DateFeb 22, 2007

Original AssigneeThe Regents Of The University Of California
The Regents Of The University Of Michigan

Current AssigneeThe Regents Of The University Of California

Inventor/ApplicantsVassili A. Kireev
Vassili A Kireev
Vijay Gupta

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