Glass-modified stress waves for separation of ultra thin films and nanoelectronics device fabrication | Patent Number 07487684

US 07487684 B2
Application Number11504981
Publication NumberUS 20070039395 A1
Pendency2 years, 6 months
Filled DateAug 15, 2006
Priority DateMar 5, 2004
Publication DateFeb 22, 2007
Expiration DateMar 5, 2024
Inventor/ApplicantsVassili A. Kireev
Vassili A Kireev
Vijay Gupta
ExaminesDAVIS-HOLLINGTON, OCTAVIA L
Art Unit2855
Technology Center2800
Assignments
The Regents Of The University Of California
Current
The Regents Of The University Of California
Original
The Regents Of The University Of Michigan
Original
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