Susceptor for MOCVD reactor | Patent Publication Number 20060269390

US 20060269390 A1

Patent NumberUS 08372204 B2

Application Number11483387

Filled DateJul 6, 2006

Priority DateMay 13, 2002

Publication DateNov 30, 2006

Original AssigneeWolfspeed Inc.

Current AssigneeWolfspeed Inc.

Inventor/ApplicantsShuji Nakamura
Steven DenBaars
Max Batres
Michael Coulter

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