Susceptor for MOCVD reactor | Patent Number 08372204
US 08372204 B2Filled DateJul 6, 2006
Priority DateMay 13, 2002
Publication DateNov 30, 2006
Expiration DateMay 13, 2022
Inventor/ApplicantsShuji Nakamura
Steven DenBaars
Max Batres
Michael Coulter
Steven DenBaars
Max Batres
Michael Coulter
ExaminesKACKAR, RAM N
Art Unit2615
Technology Center2600
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