Vapor deposition of tungsten nitride | Patent Publication Number 20060125099

US 20060125099 A1

Patent NumberUS 07560581 B2

Application Number10520456

Filled DateJul 9, 2003

Priority DateJul 12, 2002

Publication DateJun 15, 2006

Original AssigneeHarvard College

Current AssigneeNational University Of Science And Technology

Inventor/ApplicantsJill Becker
Seigi Suh
Roy G. Gordon

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