Vapor deposition of tungsten nitride | Patent Number 07560581

US 07560581 B2
Application Number10520456
Publication NumberUS 20060125099 A1
Pendency6 years, 7 days
Filled DateJul 9, 2003
Priority DateJul 12, 2002
Publication DateJun 15, 2006
Expiration DateJul 12, 2022
Inventor/ApplicantsJill Becker
Seigi Suh
Roy G. Gordon
ExaminesWU, SHEAN CHIU
Art Unit1795
Technology Center1700
Assignments
National University Of Science And Technology
Current
Harvard College
Original
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