Optical diagnostics of semiconductor process using hyperspectral imaging | Patent Number 12165937

US 12165937 B2
Application Number18075058
Publication NumberUS 20230097892 A1
Pendency2 years, 6 days
Filled DateDec 5, 2022
Priority DateMay 23, 2019
Publication DateMar 30, 2023
Expiration DateMay 22, 2039
Inventor/ApplicantsYan Chen
Xinkang TIAN
Yan CHEN
Xinkang Tian
Examines-
Art Unit0
Technology Center0
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
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