Optical diagnostics of semiconductor process using hyperspectral imaging | Patent Application Number 18075058

18075058
Not Appealed
Patent NumberUS 12165937 B2
Publication NumberUS 20230097892 A1
Filled DateDec 5, 2022
Priority DateMay 23, 2019
Inventor/ApplicantsYan Chen
Xinkang TIAN
Yan CHEN
Xinkang Tian
Examines-
Art Unit0
Technology Center0
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
Law Firm
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