CMP pad dressers having leveled tips and associated methods | Patent Number 09724802
US 09724802 B2Filled DateOct 3, 2014
Priority DateMay 16, 2005
Publication DateMay 14, 2015
Expiration DateMay 15, 2025
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
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