CMP pad dressers having leveled tips and associated methods | Patent Application Number 14506476

14506476
Not Appealed
Patent NumberUS 09724802 B2
Publication NumberUS 20150133036 A1
Filled DateOct 3, 2014
Priority DateMay 16, 2005
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
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