CMP pad dresser having leveled tips and associated methods | Patent Number 08974270

US 08974270 B2
Application Number13479148
Publication NumberUS 20120302146 A1
Pendency2 years, 9 months, 21 days
Filled DateMay 23, 2012
Priority DateMay 23, 2011
Publication DateNov 29, 2012
Expiration DateMay 22, 2031
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
Assignments
Chien Min Sung
Current
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