CMP pad dresser having leveled tips and associated methods | Patent Application Number 13479148

13479148
Not Appealed
Patent NumberUS 08974270 B2
Publication NumberUS 20120302146 A1
Filled DateMay 23, 2012
Priority DateMay 23, 2011
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
Assignments
Chien Min Sung
Current
Law Firm
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