Deep trench isolation and method for forming same | Patent Number 07772673

US 07772673 B1
Application Number11724916
Publication Number-
Pendency3 years, 4 months, 28 days
Filled DateMar 16, 2007
Priority DateMar 16, 2007
Publication Date-
Expiration DateMar 15, 2027
Inventor/ApplicantsKevin Q. Yin
Arjun Kar-Roy
Amol Kalburge
David J. Howard
Dieter Dornisch
ExaminesCHEN, JACK S J
Art Unit2893
Technology Center2800
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