Deep trench isolation and method for forming same | Patent Number 07772673
US 07772673 B1Filled DateMar 16, 2007
Priority DateMar 16, 2007
Publication Date-
Expiration DateMar 15, 2027
Inventor/ApplicantsKevin Q. Yin
Arjun Kar-Roy
Amol Kalburge
David J. Howard
Dieter Dornisch
Arjun Kar-Roy
Amol Kalburge
David J. Howard
Dieter Dornisch
ExaminesCHEN, JACK S J
Art Unit2893
Technology Center2800
Law Firm
You must be logged in to view
LoginAttorneys
Subscription-Only
View Concierge ProgramEmpower your practice with Patexia Publication Prosecution IP Module.
Get access to our exclusive rankings and unlock powerful data.
Looking for a Publication Attorney?
Get in touch with our team or create your account to start exploring a
network of over 120K attorneys.