Deep trench isolation and method for forming same | Patent Application Number 11724916
11724916
Not Appealed
Inventor/ApplicantsKevin Q. Yin
Arjun Kar-Roy
Amol Kalburge
David J. Howard
Dieter Dornisch
Arjun Kar-Roy
Amol Kalburge
David J. Howard
Dieter Dornisch
ExaminesCHEN, JACK S J
Art Unit2893
Technology Center2800
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