Method and apparatus for filtering metrology data based on collection purpose | Patent Number 06836691

US 06836691 B1
Application Number10427620
Publication Number-
Pendency1 year, 8 months, 2 days
Filled DateMay 1, 2003
Priority DateMay 1, 2003
Publication Date-
Expiration DateMay 1, 2023
Inventor/ApplicantsJames B. Stirton
ExaminesORTIZ RODRIGUEZ, CARLOS R
Art Unit2125
Technology Center2100
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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