Method and apparatus for filtering metrology data based on collection purpose | Patent Application Number 10427620

10427620
Appealed
Patent NumberUS 06836691 B1
Publication Number-
Filled DateMay 1, 2003
Priority DateMay 1, 2003
Inventor/ApplicantsJames B. Stirton
ExaminesORTIZ RODRIGUEZ, CARLOS R
Art Unit2125
Technology Center2100
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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