Electrostatic chuck with porous plug | Patent Application Number 18383430

18383430
Not Appealed
Patent NumberUS 12162111 B2
Publication NumberUS 20240051075 A1
Filled DateOct 24, 2023
Priority DateFeb 3, 2022
Inventor/ApplicantsArvinder Chadha
Tomoaki Kohzu
Arvinder CHADHA
Tomoaki KOHZU
Examines-
Art Unit0
Technology Center0
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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