Electrostatic chuck with porous plug | Patent Publication Number 20240051075

US 20240051075 A1

Patent NumberUS 12162111 B2

Application Number18383430

Filled DateOct 24, 2023

Priority DateFeb 3, 2022

Publication DateFeb 15, 2024

Original AssigneeApplied Materials Inc.

Current AssigneeApplied Materials Israel

Inventor/ApplicantsArvinder Chadha
Tomoaki Kohzu
Arvinder CHADHA
Tomoaki KOHZU

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