FeRAM MFM structure with selective electrode etch | Patent Application Number 18357240
18357240
Not Appealed
Patent NumberUS 12167611 B2
Publication NumberUS 20230371263 A1
Filled DateJul 24, 2023
Priority DateApr 25, 2019
Inventor/ApplicantsSheng-Hung Shih
Tzu-Yu Chen
Kuo-Chi Tu
Fu-Chen Chang
Chih-Hsiang Chang
Wen-Ting Chu
Tzu-Yu Chen
Kuo-Chi Tu
Fu-Chen Chang
Chih-Hsiang Chang
Wen-Ting Chu
ExaminesWARD, ERIC A
Art Unit2891
Technology Center2800
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