SEMICONDUCTOR DEVICE HAVING AIR GAP AND METHOD OF FABRICATING THEREOF | Patent Application Number 17446419

17446419
Not Appealed
Patent Number-
Publication NumberUS 20230067799 A1
Filled DateAug 30, 2021
Priority DateAug 30, 2021
Inventor/ApplicantsCheng-Chi CHUANG
Chia-Hao CHANG
Kuan-Lun CHENG
Lin-Yu HUANG
Sheng-Tsung WANG
Chih-Hao WANG
ExaminesHUNTER III, CARNELL
Art Unit2829
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
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