Colloidal silica chemical-mechanical polishing composition | Patent Application Number 14749948

14749948
Not Appealed
Patent NumberUS 09499721 B2
Publication NumberUS 20150376459 A1
Filled DateJun 25, 2015
Priority DateJun 25, 2014
Inventor/ApplicantsSteven Grumbine
Mary Cavanaugh
Ernest Shen
Jeffrey Dysard
ExaminesANGADI, MAKI A
Art Unit1713
Technology Center1700
Assignments
Cmc Materials
Current
Cabot Microelectronics CorporationEntegris
Original
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