CMP pad dresser having leveled tips and associated methods | Patent Application Number 13802112
13802112
Not Appealed
Patent NumberUS 09138862 B2
Publication NumberUS 20140099868 A1
Filled DateMar 13, 2013
Priority DateMay 23, 2011
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
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Law Firm
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