CMP pad dresser having leveled tips and associated methods | Patent Number 09138862

US 09138862 B2
Application Number13802112
Publication NumberUS 20140099868 A1
Pendency2 years, 6 months, 13 days
Filled DateMar 13, 2013
Priority DateMay 23, 2011
Publication DateApr 10, 2014
Expiration DateMay 22, 2031
Inventor/ApplicantsChien-Min Sung
ExaminesNGUYEN, GEORGE BINH MINH
Art Unit3723
Technology Center3700
Assignments
Chien Min Sung
Current
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