Fabrication of a vertical fin field effect transistor with reduced dimensional variations | Patent Publication Number 20240249980

US 20240249980 A1
Patent NumberUS 12136573 B2
Application Number18243501
Filled DateSep 7, 2023
Priority Date-
Publication DateJul 25, 2024
Original AssigneeAdeia Inc.
Current AssigneeAdeia Inc.
Inventor/ApplicantsKangguo Cheng
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