Staircase structure for memory device | Patent Publication Number 20230084008

US 20230084008 A1
Patent NumberUS 12010838 B2
Application Number17447456
Filled DateSep 13, 2021
Priority DateAug 6, 2018
Publication DateMar 16, 2023
Inventor/ApplicantsZhenyu Lu
Si Ping Hu
Kun Bao
Jun Chen
Lan Yao
Jifeng Zhu
Qian Tao
Haohao Yang
Li Hong Xiao
A Man Zheng
Xiaowang Dai
Yu Ru Huang
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