Semiconductor device and manufacturing method thereof | Patent Publication Number 20200381558

US 20200381558 A1

Patent NumberUS 11430896 B2

Application Number16928254

Filled DateJul 14, 2020

Priority DateDec 20, 2011

Publication DateDec 3, 2020

Original AssigneeSemiconductor Energy Laboratory

Current AssigneeSemiconductor Energy Laboratory

Inventor/ApplicantsShunpei Yamazaki
Shunpei YAMAZAKI

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