WAFER HANDLER FOR INFRARED LASER RELEASE | Patent Publication Number 20170170048

US 20170170048 A1

Patent Number-

Application Number14964228

Filled DateDec 9, 2015

Priority DateDec 9, 2015

Publication DateJun 15, 2017

Original AssigneeGlobalfoundries

Current AssigneeGlobalfoundries

Inventor/Applicants

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