Semiconductor device and method for manufacturing the same | Patent Publication Number 20140246673
US 20140246673 A1Patent NumberUS 09349874 B2
Application Number14278521
Filled DateMay 15, 2014
Priority DateOct 23, 2009
Publication DateSep 4, 2014
Original AssigneeSemiconductor Energy Laboratory
Current AssigneeSemiconductor Energy Laboratory
Inventor/ApplicantsToshinari Sasaki
Kengo Akimoto
Kengo Akimoto
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