Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate | Patent Publication Number 20090014842

US 20090014842 A1

Patent NumberUS 07884446 B2

Application Number12235086

Filled DateSep 22, 2008

Priority DateSep 24, 2004

Publication DateJan 15, 2009

Original AssigneeHarvard College

Current AssigneeNational University Of Science And Technology

Inventor/ApplicantsEric Mazur
Mengyan Shen

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