Test structure design for reliability test | Patent Publication Number 20070013363

US 20070013363 A1

Patent NumberUS 07365529 B2

Application Number11465646

Filled DateAug 18, 2006

Priority DateNov 24, 2004

Publication DateJan 18, 2007

Original AssigneeApplied Materials Inc.

Current AssigneeApplied Materials Israel

Inventor/ApplicantsToshiyuki Nagata
Naomi Yoshida

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