Cavity structure of bulk acoustic resonator, and manufacturing process | Patent Number 12166469

US 12166469 B2
Application Number18002678
Publication NumberUS 20230238933 A1
Pendency4 years, 5 months, 15 days
Filled DateJun 29, 2020
Priority DateJun 29, 2020
Publication DateJul 27, 2023
Expiration DateJun 28, 2040
Inventor/ApplicantsZhou Jiang
Zhou JIANG
Jinghao SHENG
Linping LI
Linping Li
Jinghao Sheng
ExaminesOUTTEN, SAMUEL S
Art Unit2843
Technology Center2800
Assignments
Jwl Zhejiang Semiconductor Co. Ltd
Current
Jwl Zhejiang Semiconductor Co. Ltd
Original
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