Automated wafer cleaning | Patent Number 11735440
US 11735440 B2Filled DateMay 4, 2022
Priority DateAug 17, 2018
Publication DateAug 18, 2022
Expiration DateAug 16, 2038
Inventor/ApplicantsChui-Ya Peng
Sen-Yeo PENG
Sen-Yeo Peng
Chun-Yu Lee
Chun-Yu LEE
Chui-Ya PENG
Sen-Yeo PENG
Sen-Yeo Peng
Chun-Yu Lee
Chun-Yu LEE
Chui-Ya PENG
ExaminesCAMPBELL, NATASHA N.
Art Unit1714
Technology Center1700
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