Joint opening structures of three-dimensional memory devices and methods for forming the same | Patent Number 10886291
US 10886291 B2Filled DateJul 26, 2018
Priority DateMar 1, 2018
Publication DateMar 14, 2019
Expiration DateFeb 28, 2038
Inventor/ApplicantsGuanping WU
Xianjin WAN
Baoyou CHEN
Feng PAN
Guanping Wu
Wenguang SHI
Zhenyu LU
Wenguang Shi
Zhenyu Lu
Feng Pan
Baoyou Chen
Xianjin Wan
Xianjin WAN
Baoyou CHEN
Feng PAN
Guanping Wu
Wenguang SHI
Zhenyu LU
Wenguang Shi
Zhenyu Lu
Feng Pan
Baoyou Chen
Xianjin Wan
ExaminesPATEL, REEMA
Art Unit2812
Technology Center2800
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