MEMS sensors with selectively adjusted damping of suspension | Patent Number 10822225

US 10822225 B2
Application Number15643174
Publication NumberUS 20180179049 A1
Pendency3 years, 4 months, 1 day
Filled DateJul 6, 2017
Priority DateDec 27, 2016
Publication DateJun 28, 2018
Expiration DateDec 26, 2036
Inventor/ApplicantsMichael Schneider
Mikulas Jandak
Ulrich Schmid
ExaminesWARREN, MATTHEW E
Art Unit2815
Technology Center2800
Assignments
Honeywell International
Current
Honeywell International
Original
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