Projection objective for a microlithographic projection exposure apparatus | Patent Number 08902407
US 08902407 B2Filled DateOct 13, 2011
Priority DateJun 10, 2004
Publication DateFeb 9, 2012
Expiration DateJun 10, 2024
Inventor/ApplicantsNorbert Wabra
Robert Eder
Robert Eder
ExaminesKREUTZER, COLIN WRIGHT
Art Unit2882
Technology Center2800
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