Semiconductor device including MISFET having internal stress film | Patent Number 07893501

US 07893501 B2
Application Number12170191
Publication NumberUS 20090050981 A1
Pendency2 years, 7 months, 18 days
Filled DateJul 9, 2008
Priority DateJun 3, 2004
Publication DateFeb 26, 2009
Expiration DateJun 3, 2024
Inventor/ApplicantsHiroyuki Umimoto
Masafumi Tsutsui
Kaori Akamatsu
ExaminesWEISS, HOWARD
Art Unit2814
Technology Center2800
Assignments
Godo Kaisha Ip Bridge 1
Current
Panasonic
Original
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