Multiple millisecond anneals for semiconductor device fabrication | Patent Number 07846803

US 07846803 B2
Application Number11756197
Publication NumberUS 20080299750 A1
Pendency3 years, 6 months, 11 days
Filled DateMay 31, 2007
Priority DateMay 31, 2007
Publication DateDec 4, 2008
Expiration DateDec 7, 2018
Inventor/ApplicantsVishal P. Trivedi
Gregory S. Spencer
ExaminesQUACH, TUAN N
Art Unit2893
Technology Center2800
Assignments
Morgan Stanley Senior Funding Inc.
Current
Freescale Semiconductor Inc.Nxp Semiconductors
Original
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