Multiple dielectric FinFET structure and method | Patent Number 07378357

US 07378357 B2
Application Number11264446
Publication NumberUS 20060054978 A1
Pendency2 years, 6 months, 28 days
Filled DateNov 1, 2005
Priority DateMar 18, 2004
Publication DateMar 16, 2006
Expiration DateMar 18, 2024
Inventor/ApplicantsWilliam F. Clark
Edward J. Nowak
William F. Clark, Jr.
ExaminesSNOW, COLLEEN ERIN
Art Unit2813
Technology Center2800
Assignments
Globalfoundries
Current
International Business Machines
Original
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