Wafer dryer and method for drying a wafer | Patent Number 07181863
US 07181863 B2Filled DateMar 9, 2005
Priority DateMar 9, 2004
Publication DateNov 24, 2005
Expiration DateFeb 27, 2011
Inventor/ApplicantsJagjit S. Ratra
Gary W. Ferrell
Gary W. Ferrell
ExaminesGRAVINI, STEPHEN MICHAEL
Art Unit3749
Technology Center3700
Assignments
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