Method of supporting and adjusting optical element in exposure apparatus | Patent Number 07136238

US 07136238 B2
Application Number10637345
Publication NumberUS 20040105177 A1
Pendency3 years, 3 months, 9 days
Filled DateAug 8, 2003
Priority DateAug 8, 2003
Publication DateJun 3, 2004
Expiration DateAug 8, 2023
Inventor/ApplicantsRyuichi Ebinuma
Ryuichi Ebinuma
ExaminesAMARI, ALESSANDRO V
Art Unit2872
Technology Center2800
Assignments
Canon Inc.
Current
Canon Inc.
Original
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