Concurrent measurement of critical dimension and overlay in semiconductor manufacturing | Patent Number 07080330

US 07080330 B1
Application Number10379738
Publication Number-
Pendency3 years, 4 months, 16 days
Filled DateMar 5, 2003
Priority DateMar 5, 2003
Publication Date-
Expiration DateMar 5, 2023
Inventor/ApplicantsCarmen Morales
Bryan Choo
Bhanwar Singh
Bharath Rangarajan
ExaminesLIN, SUN J
Art Unit2825
Technology Center2800
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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