Bandwidth control technique for a laser | Patent Number 07079556

US 07079556 B2
Application Number10670406
Publication NumberUS 20040057474 A1
Pendency2 years, 9 months, 28 days
Filled DateSep 24, 2003
Priority DateFeb 9, 2000
Publication DateMar 25, 2004
Expiration DateJul 18, 2018
Inventor/ApplicantsArmen Kroyan
Gamaralalage G. Padmabandu
Igor V. Fomenkov
Richard L. Sandstrom
Palash P. Das
John Martin Algots
Richard L. Sandstrom
Palash P. Das
John Martin Algots
Frederick G. Erie
Armen Kroyan
Frederick G. Erie
Jesse D. Buck
Gamaralalage G. Padmabandu
Igor V. Fomenkov
Jesse D. Buck
ExaminesVANNUCCI, JAMES
Art Unit2828
Technology Center2800
Assignments
Cymer Inc.
Current
Cymer Inc.
Original
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