In-situ nitride/oxynitride processing with reduced deposition surface pattern sensitivity | Patent Number 07009226

US 07009226 B1
Application Number10887836
Publication Number-
Pendency1 year, 7 months, 28 days
Filled DateJul 12, 2004
Priority DateJul 12, 2004
Publication Date-
Expiration DateJul 12, 2024
Inventor/ApplicantsSey-Ping Sun
ExaminesMUNSON, GENE M
Art Unit2811
Technology Center2800
Assignments
Innovative Foundry Technologies Llc
Current
Advanced Micro Devices Inc
Original
Law Firm
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