Semiconductor device, manufacturing method and apparatus for the same | Patent Number 06969915
US 06969915 B2Filled DateJan 14, 2002
Priority DateJan 14, 2002
Publication DateJul 18, 2002
Expiration DateJan 14, 2022
Inventor/ApplicantsTomohiro Nishiyama
Kaoru Mikagi
Tomohiro Nishiyama
Tetuya Tao
Kaoru Mikagi
Tetuya Tao
Masamoto Tago
Masamoto Tago
Kaoru Mikagi
Tomohiro Nishiyama
Tetuya Tao
Kaoru Mikagi
Tetuya Tao
Masamoto Tago
Masamoto Tago
ExaminesPAREKH, NITIN
Art Unit2811
Technology Center2800
Law Firm
You must be logged in to view
LoginAttorneys
Subscription-Only
View Concierge ProgramEmpower your practice with Patexia Publication Prosecution IP Module.
Get access to our exclusive rankings and unlock powerful data.
Looking for a Publication Attorney?
Get in touch with our team or create your account to start exploring a
network of over 120K attorneys.