Automated wafer defect inspection system and a process of performing such inspection | Patent Number 06826298

US 06826298 B1

Application Number9562273

Publication Number-

Pendency4 years, 7 months, 6 days

Filled DateApr 29, 2000

Priority DateJul 14, 1998

Publication Date-

Expiration DateJul 14, 2018

Inventor/ApplicantsMark Harless
Thomas Verburgt
Jeffrey O'Dell
Cory Watkins

ExaminesAHMED, SAMIR ANWAR

Art Unit2623

Technology Center2600

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