Diffusion preventing barrier layer in integrated circuit inter-metal layer dielectrics | Patent Number 06727588
US 06727588 B1Filled DateAug 19, 1999
Priority DateAug 19, 1999
Publication Date-
Expiration DateAug 19, 2019
Inventor/ApplicantsPei H. Yih
Mahjoub Ali Abdelgadir
Sailesh Mansinh Merchant
Vivek Saxena
Nace Layadi
Mahjoub Ali Abdelgadir
Sailesh Mansinh Merchant
Vivek Saxena
Nace Layadi
ExaminesOWENS, DOUGLAS W
Art Unit2811
Technology Center2800
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