Low dielectric constant etch stop layers in integrated circuit interconnects | Patent Number 06388330
US 06388330 B1Filled DateFeb 1, 2001
Priority DateFeb 1, 2001
Publication Date-
Expiration DateFeb 1, 2021
Inventor/ApplicantsMinh Van Ngo
Dawn M. Hopper
Terri J. Kitson
Robert A. Huertas
Dawn M. Hopper
Terri J. Kitson
Robert A. Huertas
ExaminesNGUYEN, HA TRAN
Art Unit2812
Technology Center2800
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