High density plasma passivation layer and method of application | Patent Number 06153543
US 06153543 NAFilled DateAug 9, 1999
Priority DateAug 9, 1999
Publication Date-
Expiration DateAug 9, 2019
Inventor/Applicants Edward P. Martin, Jr.
Leonard J. Olmer
Barbara D. Kotzias
Daniel P. Chesire
Rafael N. Barba
Leonard J. Olmer
Barbara D. Kotzias
Daniel P. Chesire
Rafael N. Barba
ExaminesGHYKA, ALEXANDER G
Art Unit2812
Technology Center2800
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