Parallel ion optics and apparatus for high current low energy ion beams | Patent Number 05811820
US 05811820 NAFilled DateJun 12, 1996
Priority DateJun 13, 1995
Publication Date-
Expiration DateJun 13, 2015
Inventor/Applicants Nicholas J. Kirchner
Efim A. Dynin
Oleg V. Alexandrov
Felix G. Gutman
Efim A. Dynin
Oleg V. Alexandrov
Felix G. Gutman
ExaminesLORING, SUSAN
Art Unit1641
Technology Center1600
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